Niedrigtemperatur-Rastersondenmikroskop für die In-operando-Nanoskopie von Bauelementen

Beschreibung

The subject of this tender is a low-temperature (<3K), ultrahigh vacuum (UHV) scanning probe microscopy system with optical access to the scanned sample to pinpoint device structures in the sub-micrometer range to be investigated on the atomic level. The system provides state-of-the-art scanning tunneling microscopy (STM), spectroscopy (STS) and tuning fork based noncontact atomic force microscopy (nc-AFM), including UHV preparation chamber and load lock.