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Ultra-high Resolution Electron-beam Lithography System

Publication no.
45007-01
Published on
Procedure
Open procedure
Submission deadline

Description

The B & R Nanotechnology Center (BRNC) at ETH Zurich invites tenders for the purchase of one (1) ultra-high resolution electron-beam lithography (EBL) system. The system will be used for a variety of research activities of internal and external users, ranging from the generation of high-precision structures at the nanometer level to the rapid exposure of complex structures over large areas. The scope includes delivery, installation, training and acceptance of the system.

Official publication: project 45007 on simap.ch. Only the version published there is authoritative.
Details
Contracting authorityETH Zürich - Abt. Procurement & Export Services
LocationRüschlikon
CantonZurich
Contract typeSupply contract
CPV38000000
Laboratory, optical and precision equipments (excl. glasses)
Covered by international treatiesYes